Tetrafluoromethane (CF4): Properties, Applications, and Safety for Industrial Use

Explore the unique characteristics of Tetrafluoromethane (CF4), a critical gas in modern industries from semiconductor manufacturing to advanced refrigeration. Discover its applications, chemical inertness, and the safety protocols essential for its handling.

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Advantages Offered by Tetrafluoromethane

Exceptional Chemical Inertness

Tetrafluoromethane exhibits remarkable stability due to the strength of its carbon-fluorine bonds, making it resistant to acids and hydroxides. This chemical inertness is vital for its use in demanding industrial applications.

Versatile Semiconductor Etching

In the electronics industry, CF4 is a cornerstone for plasma etching, enabling precise material removal for creating complex microelectronic devices and understanding semiconductor processing.

Effective Low-Temperature Refrigerant

As R-14, Tetrafluoromethane serves as an effective refrigerant for ultra-low temperature applications, contributing to advancements in cooling technologies and the broader refrigerant landscape.

Key Applications

Semiconductor Manufacturing

CF4 is extensively used in plasma etching for silicon, silicon dioxide, and silicon nitride, crucial steps in the fabrication of microchips and electronic components.

Refrigeration Systems

Known as R-14, it functions as a low-temperature refrigerant, particularly in specialized cooling systems requiring extremely low operating temperatures.

Plasma Chamber Cleaning

It serves as an effective gas for cleaning deposition chambers in semiconductor manufacturing, ensuring optimal equipment performance and process consistency.

Specialty Chemical Synthesis

As a source of fluorine and fluorinated radicals, CF4 finds applications in specialty chemical synthesis and research and development.